JPH0631374Y2 - 感熱式流量センサ - Google Patents
感熱式流量センサInfo
- Publication number
- JPH0631374Y2 JPH0631374Y2 JP7810588U JP7810588U JPH0631374Y2 JP H0631374 Y2 JPH0631374 Y2 JP H0631374Y2 JP 7810588 U JP7810588 U JP 7810588U JP 7810588 U JP7810588 U JP 7810588U JP H0631374 Y2 JPH0631374 Y2 JP H0631374Y2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- sensitive
- sensitive resistor
- resistor
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 11
- 239000012530 fluid Substances 0.000 claims description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7810588U JPH0631374Y2 (ja) | 1988-06-13 | 1988-06-13 | 感熱式流量センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7810588U JPH0631374Y2 (ja) | 1988-06-13 | 1988-06-13 | 感熱式流量センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02628U JPH02628U (en]) | 1990-01-05 |
| JPH0631374Y2 true JPH0631374Y2 (ja) | 1994-08-22 |
Family
ID=31303054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7810588U Expired - Lifetime JPH0631374Y2 (ja) | 1988-06-13 | 1988-06-13 | 感熱式流量センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0631374Y2 (en]) |
-
1988
- 1988-06-13 JP JP7810588U patent/JPH0631374Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02628U (en]) | 1990-01-05 |
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